Abstract
We have investigated the surface morphologies of vicinal SrTiO3 substrates and YBa2Cu3O7-δ (YBCO) thin films by atomic force microscopy (AFM). Extremely regular step arrays had been successfully developed vicinal SrTiO3 with 5.7° misorientation. AFM reveals a great improvement of the surface microstructures of YBCO thin films grown on such terraced vicinal substrates, exhibiting a regular step-flow growth mode and almost precipitate-free surfaces of practical device sizes. By a high growth rate and low growth temperature, the step bunching and therefore the total roughness have been substantially suppressed.
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