Abstract
The plane-view high-resolution transmission electron microscopy (HRTEM) images in ZnO thin films grown on p-Si substrates showed that (101¯0) asymmetric grain boundaries with a periodic array of strain contrast features existed in a sparse columnar structure for as-grown ZnO thin films and that (112¯0) asymmetric grain boundaries and (8513¯0) symmetric grain boundaries existed in a dense columnar structure for annealed ZnO thin films. The atomic arrangement variations of [0001]-tilt grain boundaries in ZnO thin films grown on Si substrates due to thermal treatment are described on the basis of the HRTEM results.
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