Abstract
A plasma-enhanced chemical vapor deposition system was used to deposit super thick diamond-like carbon (DLC)-based films ((Six-DLC/Siy-DLC)n). The aim of this work is to investigate the properties of super thick films to verify that increasing the thickness of DLC films offers the possibility of improving their properties at high temperatures. The investigation revealed that superthick (Six-DLC/Siy-DLC)n film exhibited excellent tribological property up to 500°C. One reason is that a thin layer that consists of nanocrystals SiC is formed on the top of wear track. Another is that the stress mostly concentrates near the top surface.
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