Aqueous solution-based synthesis of rare earth-doped metal oxide thin films

Abstract

Rare earth-doped TiO 2 thin films have been successfully formed on glass and Si wafer substrates from aqueous solution through equilibrium reaction between metal–fluoro complex and metal oxide, in which Ln 3+–ethylenediaminetetraacetic acid (EDTA) complex (Ln: rare earth metal) was added into the reaction solution. Ln/Ti ratio and crystalline structure of the film could be controlled by varying the initial concentration of Ln 3+–EDTA complex solution. The obtained Ln-doped films were densely-packed and had no cracks.