Abstract

Y–Ba–Cu–O films were prepared on yttria-stabilized zirconia polycrystalline substrate using KrF excimer laser irradiation with ethylene diamine tetra-acetic acid (EDTA) complexes as a target material. The results of the x-ray θ-2θ scan showed that the films grown above 750 °C were preferentially oriented with a c-axis normal to the substrate. The value of full-width at half-maximum of (005) reflection reduced from 4.4° to 2.1° by increasing the laser power density in a range between 0.8 and 3.8 J/cm2. The transcription of the compositional ratio was improved by approaching the target-substrate distance from 45 to 20 mm. The films obtained at 800 °C consisted of many islands showing well-developed spiral growth, suggesting that the droplets of metal-EDTA complexes do not form random oriented crystalline particles on the surface of the substrate.

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