Abstract
Semiconductor factories are significantly affected by the spray pattern of ceiling sprinkler heads owing to the large scale and complex mix of organic/exhaust ducts and multiple pipes. Therefore, sprinkler heads are installed in the spray disorder section of the lower barrier. However, more efficient installation measures are needed to mitigate the absence of detailed installation standards and interference with human and equipment transport lines. Currently, installation causes major confusion at construction sites and increases construction costs. The purpose of this research is to overcome these challenges by evaluating the operation status of sprinkler facilities in semiconductor factories, identify problems, and suggest more efficient installation measures. An installation plan that considers maintenance and fire extinguishing performance together is reviewed, and supported systematically with a relevant checklist.
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