Abstract
Problem statement: Maintenance is an important factor in semiconductor factories, not only because of costs and the need for the uninterrupted operation of semiconductor equipment, but also the time and expense required for maintenance. If maintenance procedures are not performed properly, the equipment will have low efficiency or break down, production capacity will decrease and the company will incur extra costs. Therefore, the evaluation of maintenance performance has become a critical issue in semiconductor industries. Approach: This study evaluated maintenance performance by using the Analytical Hierarchy Process (AHP), Grey Relational Analysis (GRA) and the Technique for Order Preference by Similarity to Ideal Solution (TOPSIS). The weight of maintenance indicators was derived by AHP method, which were input to the GRA and TOPSIS method for evaluate the performance of Condition-Based Maintenance (CBM) and Time-Based Maintenance (TBM) strategies. Results: Actual data was provided by a well-known semiconductor factory in Taiwan. This study evaluated and compared the performance of different maintenance strategies implemented in semiconductor companies. Empirical results indicated that the CBM strategy had better maintenance performance than the TBM strategy in semiconductor companies and the maintenance indicators which should be improved were also identified. Conclusion/Recommendations: The feasibility of the maintenance evaluation method was demonstrated through an actual scenario, which can help managers make decisions objectively and distinguish the advantages and disadvantages of the maintenance strategy.
Highlights
Once an equipment or system has been build up, it should be maintained for efficiency and workability
Maintenance plays an important role in semiconductor factories, because semiconductor equipment is expensive and needs to operate uninterrupted, and because the time and expense of maintenance is a great cost for semiconductor factories
This study aims to evaluate the performance of Condition-Based Maintenance (CBM) and Time-Based Maintenance (TBM) strategies in semiconductor factory and identifying maintenance indicators which should be improved
Summary
Once an equipment or system has been build up, it should be maintained for efficiency and workability. Maintenance program can be regarded as a production sustainable function to prevent the low yield and failure of system. The tendency towards completed automation forces managers to emphasize the evaluation of maintenance performance. Maintenance plays an important role in semiconductor factories, because semiconductor equipment is expensive and needs to operate uninterrupted, and because the time and expense of maintenance is a great cost for semiconductor factories. If maintenance procedures are not performed properly, the equipment will have low efficiency or break down, production capacity will decrease and the factory will incur extra costs. The evaluation of maintenance performance has become an important issue in semiconductor factories. Maintenance performance is difficult to evaluate and depends significantly on various resources in an organization, including the supplement of spare parts and other maintenance materials, manpower, necessary tools and correct instruments and timing for maintenance
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