Abstract

Black silicon fabrication and manipulation have been well reported by institutes around the world and are quite useful for solar absorption and photovoltaic conversion. In this study, silicon micro-nano hybrid structures were fabricated, and the morphologies of the hybrid structures were analyzed. This paper studied nanostructures formed on tips, pits and a flat surface using a dry etching method and a wet etching method. In terms of nanostructure morphology, nanostructures etched by the wet etching method (13 μm) were taller than those etched by the dry etching method (1 μm), but the wet etched morphology was less organized. After the nanostructures were grown, six samples with nano sturctures and three samples with micro sturctures were measured by a photometer for reflectivity testing. The nine samples were compared and analyzed using the integral of reflectivity and solar emissivity at the earth’s surface. The results show that the nanostructures grown on a tip surface using the wet etching method had the minimum reflectivity in the wavelength range of 300 nm–1100 nm, in consideration of the forbidden energy gap of silicon.

Highlights

  • Solar cells are essential in applications of energy harvesting and energy storage

  • First step - micro structure fabrication Dry etching by ICP Dry etching by ICP No treatment Dry etching by ICP Dry etching by ICP No treatment Dry etching by ICP Dry etching by ICP No treatment

  • Second step - nano structure fabrication Metal-assisted wet chemical etching Metal-assisted wet chemical etching Metal-assisted wet chemical etching Dry etching by ICP Dry etching by ICP Dry etching by ICP No treatment No treatment No treatment

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Summary

Results and Discussions

The wet-tip sample (No 1) indicated the better performance, high absorption and low reflectance, than other samples. Nanograsses fabricated by wet metal-assisted etching were higher than using dry etching On the another hand, it is because nanograsses covered whole profile of tips along with level surface on silicon wafer that realized highest absorption. We consider this work as the step in reducing the reflectance and absorption of solar cells

Conclusion
Author Contributions
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