Abstract
Integration of elementary fluxes of molecules crossing the entrance and scattered from tube walls in molecular flow was undertaken. Results, which were verified with Monte Carlo simulation procedure, show variation of angular distribution in an exit, i.e., the shapes of distribution curves are no longer the same in different zones of the exit surface. These results characterize the cylindrical tube as a molecular source better than results from previous papers calculated for targets placed at some distance from the exit of the tube.
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More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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