Abstract
There is a long history of using angle sensors to measure wavefront. The best example is the Shack-Hartmann sensor. Compared to other methods of wavefront sensing, angle-based approach is more broadly used in industrial applications and scientific research. Its wide adoption is attributed to its fully integrated setup, robustness, and fast speed. However, there is a long-standing issue in its low spatial resolution, which is limited by the size of the angle sensor. Here we report a angle-based wavefront sensor to overcome this challenge. It uses ultra-compact angle sensor built from flat optics. It is directly integrated on focal plane array. This wavefront sensor inherits all the benefits of the angle-based method. Moreover, it improves the spatial sampling density by over two orders of magnitude. The drastically improved resolution allows angle-based sensors to be used for quantitative phase imaging, enabling capabilities such as video-frame recording of high-resolution surface topography.
Highlights
There is a long history of using angle sensors to measure wavefront
Its fast speed and robustness make it possible to have real-time record of the temporal dynamics of surface morphology, which used to be extremely difficult to achieve with traditional metrology tools
We use an angle sensor based on flat optics
Summary
There is a long history of using angle sensors to measure wavefront. The best example is the Shack-Hartmann sensor. We demonstrate a high-resolution wavefront sensor based on integrated angle sensors. The low spatial resolution of angle-based wavefront sensors is caused by the large size of the lenses. We use an angle sensor based on flat optics.
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