Abstract

The Shack-Hartman wavefront sensor is a common metrology tool in the field of laser, adaptive optics and astronomy. However, this technique is still scarcely used in optics and optical system metrology. With the development of manufacturing techniques and the increasing need for optical characterization in the industry, the Shack-Hartmann wavefront sensor emerges as an efficient complementary tool to the well-established Fizeau interferometry for optical system metrology. Moreover, the raise of smart vehicles equipped with optical sensors and augmented reality, the optical characterization of glass and transparent flat materials becomes an issue that can be addressed with Shack-Hartmann sensors. Aberration measurements of challenging optics will be presented such as optical filters, thin flat optics, aspheric lenses and large optical assemblies.

Highlights

  • In a Shack-Hartmann (SH) [1] wavefront sensor a microlens array is placed in front of a detector and each illuminated microlens is focusing on a dedicated part of the detector

  • The position of each focal spot is compared to a reference position, determined during calibration, gives information about the local slope of the wavefront which is used to reconstruct the aberration map of an optical system

  • We performed a comparison between a Fizeau interferometer and a SH wavefront sensor by characterizing a large flat substrate under the same conditions

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Summary

Shack-Hartmann Principle

In a Shack-Hartmann (SH) [1] wavefront sensor a microlens array is placed in front of a detector and each illuminated microlens is focusing on a dedicated part of the detector. Collimator, allowing to make a measurement on a pupil of 100 mm in diameter

Comparison of a Shack-Hartmann wavefront sensor and a Fizeau interferometer
Optical filters
Glass and flat optics
Aspheric lenses and freeform optics
Optical assemblies
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