Abstract
Film bulk acoustic resonator (FBAR) based on single crystal LiNbO3 are promising for next-generation high Q, wideband filters in telecommunications. The crystal orientation of LiNbO3 has significant impacts on the FBAR performance, and the bulk acoustic wave (BAW) velocity was calculated by solving the Christoffel’s equation in each crystal orientation. The electromechanical coupling coefficient of every cut was obtained. Moreover, the impedance information and the film displacement of various crystal orientations were analyzed by the finite element method (FEM). Analytical results demonstrate that the effective coupling coefficient and the number of BAW modes vary with the crystal orientation.
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