Abstract
Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and a standard CMOS compatible integration process. However, a traditional BAW filter generally presents only one frequency transmission band; hence, it cannot meet the demands of multi-mode wireless communication systems. In this work, we propose a radio frequency dual-band filter based on a dual-mode film bulk acoustic resonator (FBAR). The dual-mode FBAR consists of molybdenum electrodes and an aluminum nitride film with a c axis tilt angle, which leads to the coexistence of the longitudinal mode and the shear mode in the resonator. The influence of the tilt angle on the resonant frequency and electromechanical coupling coefficient of the dual-mode FBAR is investigated. Subsequently, the behaviors of the dual-mode FBAR have been emulated by a modified Butterworth–Van Dyke model with two motional branches, which is further used to design and optimize the dual-band filter. The dual-mode FBAR-based filters connected in a ladder configuration present two dual passbands of 43 MHz and 105 MHz, respectively. The developed filters with dual passbands can give an inspiration to the design of BAW devices in modern wireless communications.
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