Abstract
This paper presents optimal design of switchable BST-on-Si composite film bulk acoustic resonators (FBARs) for bulk acoustic wave (BAW) filter applications. To design BAW filters with lower insertion losses and wider bandwidth, resonators' Q×K,2 is maximized. Furthermore, lateral wave spurious resonances that can significantly degrade the composite FBARs performance, are eliminated by designing a frame at the border of ferroelectric-on-Si FBARs. Using COMSOL simulations, a raised frame is designed at the border of BST-on-Si composite FBAR, which is dispersion type I resonator. Designed structure has been validated by fabrication and measurement and it is compared to typical composite FBAR structures without frame.
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