Abstract
This paper presented semi-analytical approach in order to investigate the influence of manufacturing process defects on the elasticity of thin microbeam. The Rayleigh Beam Model (RBM) will be analyzed and corrected using 3D FEM scripts including the effects of the cross-section shape and the under-etching. This model was tested on measurements of thin chromium microbeam of dimensions (80 × 2 × 0.95 μm3). The results show that the influence of defects is very significant for the extracted value of Young's modulus where it is very close to the measured value and it is about 279.1 GPa.
Highlights
Measurement of the resonant frequencies is a common technique for the evaluation of the Young’s modulus of thin microbeams
This paper presented semi-analytical approach in order to investigate the influence of manufacturing process defects on the elasticity of thin microbeam
The Rayleigh Beam Model (RBM) will be analyzed and corrected using 3D finite elements method (FEM) scripts including the effects of the cross-section shape and the under-etching
Summary
Measurement of the resonant frequencies is a common technique for the evaluation of the Young’s modulus of thin microbeams. The measured frequencies are very sensitive to the under-etching and the cross-section shape due to the manufacturing process [1]. The improved model proposed in this study investigates these defects for an accurate determination of the Young’s modulus value
Sign-in/Register to view highlights & summary 
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call