Abstract

AbstractIn this paper, an analytical model for finding the S‐factor of the FC‐SGT flash memory cell is derived. It is confirmed that the results of analysis agree well with the three‐dimensional simulation results. In comparison with the conventional planar flash memory cell, the FC‐SGT flash memory cell has a sufficiently smaller S‐factor. As a result, it is easier to realize multilevel operation by the FC‐SGT flash memory than by the conventional planar flash memory. © 2006 Wiley Periodicals, Inc. Electron Comm Jpn Pt 2, 89(8): 34–41, 2006; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/ecjb.20250

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