Abstract
Methodological approaches to both qualitative structural analysis and quantitative compositional analysis of transparent complex oxide films on dielectric substrates, performed using a Horiba LabRAM HR800 confocal Raman spectrometer and a Cameca SX100 electron probe microanalyzer, are described. The studies were carried out using magnesium–aluminum spinel films of a thickness of 1–3 µm on a quartz glass substrate, obtained by magnetron sputtering. The characterization of the film structure consisted of recording 3D arrays of its Raman spectra based on z depth profiling. The film has a disordered spinel structure with a partially reversed distribution of Mg and Al cations over octa- and tetra-positions. Operation parameters are identified to evaluate the concentration of structure-forming elements (Mg and Al) and impurities (Ti, Cr, Ca, P, Fe, Ni, and Gd) in the film using various X-ray emission lines (optimal accelerating voltage, etc.). The performance of the procedure was determined, and its capabilities and limitations were assessed. The resulting data on the chemical composition of the film are presented.
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