Abstract
The optical waveguide formation in X-cut KTiOPO 4 was achieved by single energy implantation of 3.0 MeV He + to a total dose of 2.0×10 16ions/cm 2 at liquid nitrogen temperature. The modes were examined by the prism (LiTaO 3) coupling method. The analysis of the refractive index profile in the KTiOPO 4(100) waveguide was performed based on parametrized index profile reconstruction (PIPR). We have used the TRIM (the transport of ions in matter) code to simulate the energy loss distribution. The result shows that the nuclear collision mostly influences the refractive index profile, but the peak position of the refractive index profile is shallower than that of the nuclear energy loss distribution.
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