Abstract
As an important support for test and control projects, sensor’s performance is directly related to the accuracy of the measurement. To fully analyze the sources of measurement uncertainty for a surface acoustic wave micro-pressure sensor, in this study the Monte Carlo method and Guide to the Expression of Uncertainty in Measurement to evaluate measurement uncertainty of sensors are used, the sensing experiment was conducted and the measurement addition model was established. We determined the source of measurement uncertainty for a surface acoustic wave micro-pressure sensor. The results show that the Monte Carlo method can obtain a more reliable and accurate inclusion interval in the measurement uncertainty evaluation of a surface acoustic wave micro-pressure sensor.
Highlights
With the continuous development and application of sensor technology, surface acoustic wave (SAW) micropressure sensors are widely used to measure important physical quantities, such as surface force, hydraulic pressure and object acceleration, which has strong antiinterference ability and high accuracy and resolution when performing pressure measurement.[1,2] measurement uncertainty analysis of the sensor is a criterion for evaluating the quality of the measurement results, and an important index that directly affects the above-mentioned various applications.[3]
According to the empirical value measured by the SAW micro-pressure sensor, there is a linear relationship between the input and output values
This paper proposes the use of GUM and Monte Carlo method (MCM), respectively, for the measurement uncertainty evaluation of the SAW micro-pressure sensor
Summary
With the continuous development and application of sensor technology, surface acoustic wave (SAW) micropressure sensors are widely used to measure important physical quantities, such as surface force, hydraulic pressure and object acceleration, which has strong antiinterference ability and high accuracy and resolution when performing pressure measurement.[1,2] measurement uncertainty analysis of the sensor is a criterion for evaluating the quality of the measurement results, and an important index that directly affects the above-mentioned various applications.[3]. Based on the measurement results, this paper selects sensitivity, non-linearity and repeatability as the uncertain sources of the SAW micro-pressure sensor.
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