Abstract
Carbon in semi-insulating gallium arsenide (GaAs) crystals has been investigated by Fourier-transform IR absorption spectroscopy, spark source mass spectrometry, and charged particle activation analysis. Procedures for the quantitative evaluation of the 582-cm-1 local mode absorption due to carbon on the arsenic sublattice (CAs) are described. The strength of the mode shows a linear correlation with total carbon content measured by spark source mass spectrometry over the concentration range from 3× 1014 to 2×1016 cm-3. The new calibration factor for the integrated absorption at 77 K is (7.2±0.4)× 1015 cm-1, based on a relative sensitivity coefficient of 3.2±0.1 of the spark source mass spectrometry. Calibration factors for the IR absorption method at room temperature are also given.
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