Abstract
In MEMS technology, MEMS Resonators has shown high potential applications in wireless communications such as Bluetooth and WIFI range. The Bulk Acoustic Wave (BAW) Resonator is a device which has more potential to meet the needs of today’s wireless technology. The Acoustic wave technology has attracted more attention and it’s an effective solution for achieving high-performance RF filters applications due to its low cost and small size of the device. The performance analysis of thin film bulk acoustic resonator (FBAR) by varying different piezoelectric material, piezoelectric material’s thickness and electrode materials is demonstrated in this paper. It is understood that the Quality factor is considerable higher for AlN as compared to ZnO and LiNbO3. Among all the materials, Aluminium electrode achieved maximum quality factor. As the thickness of piezo material decreases, it is found that the resonant frequency and Quality factor increases. Along with the Quality Factor, the top and bottom electrode thickness has a significant impact on the resonant frequency.
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