Energy Efficient MEMS Filter With High Quality Factor

Abstract

ABSTRACT A thin-film bulk acoustic resonator (FBAR) is a device consisting of a piezoelectric material sandwiched between two electrodes and acoustically isolated from the surrounding medium. This paper describes a 2.4 FBAR MEMS filter with high quality factor for RF application. A ladder-type bulk acoustic wave (BAW) filter based on piezoelectric thin film bulk acoustic resonators (FBARs) is designed. The Thin Film Bulk Acoustic Resonator (TFBAR) is used for the RF application. It is designed using aluminum nitride (AlN) and electrodes of piezoelectric material which is made with aluminum to control the effective electromechanical coupling coefficient. A low area FBAR filter is designed with different parameters into consideration for 2.4 GHz frequency. The high-quality factor means low insertion loss which will be greater than 500 in the designing of FBAR filter. Keywords: RF application, piezoelectric material, film bulk acoustic resonator (FBAR), Electrodes, MEMS technology, Quality factor. Cite this Article: Pankaj Rangaree. Energy Efficient MEMS Filter With High Quality Factor. International Journal of Solid State Materials. 2019; 5 (2): 1–10p.