Abstract
This paper illustrates the capabilities of “low-energy electron induced X-ray spectrometry” (LEEIXS) for surface and thin, or ultra-thin, film analysis. The work deals with anodic films and shows that it is possible to measure oxide film thicknesses in a range between 0 and a few hundred angströms. In addition, it is demonstrated that this technique provides some information about the distribution of impurities in the interior of the films.
Full Text
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call