Abstract
AbstractUsing low-energy electron induced X-ray spectroscopy (LEEIXS) with a cold cathode tube as excitation source and appropriate calibrations, quantitative surface composition informations are obtained. The results concern anodic film thicknesses and carbon impurities, In addition, qualitative informations on the chemical state of the film components are deduced from the fine structure of X-ray emission bands. The results concern oxygen K emission spectra from CuO and Cu2O, SnO, SnO2 and anodized Sn. It is also shown the capabilities of LEEIXS for gaining element-depth profiles, One example pertaining to phosphorus impurities in Al2O3 anodic films is given. Finally advantages and disadvantages of LEEIXS over ion-induced X-ray spectroscopy are discussed.
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