Abstract
The properties of a titanium nitride film prepared by a DC arc plasma jet were investigated by microscopic observations, composition analysis, and hardness measurements. Scanning electron microscopy showed that the film was composed of three phases, designated the A, B, and C regions from the outer surface. The existence of three regions was also supported by composition analysis and hardness measurements on the cross section. XRD patterns showed the presence of δ-TiN in the A region. In the B region, a number of voids were observed, which have never been reported in previous papers. These were made up from specific crystallographic surfaces. The C region also had a few voids which were somewhat different from those in the B region. In the matrix, an acicular texture was found and identified as α-Ti solid solution by XRD. The cross section of the film changed the color determined by the nitrogen content.
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