Abstract

Bioactive nanocrystalline ZrO2 coatings were prepared onto (100) Si substrates by using a chemical solution deposition with a zirconium naphthenate as a starting material. Precursor sol was spin-coated onto the substrates and prefired at 500°C for 10 min in air. Formation of crystalline ZrO2 film was observed at 800°C by X-ray diffraction. Surface morphology and surface roughness of the film were characterized by field emission-scanning electron microscope and atomic force microscope. After soaking for 5 days in a simulated body fluid, formation of the calcium phosphate was observed on ZrO2 film annealed at 800°C by energy dispersive X-ray spectrometer. Fourier transform infrared spectroscopy revealed that carbonate was substituted into the calcium phosphate.

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