Abstract
This is a report on the first setup of a recently developed, extremely sensitive and very fast 3D quadrupole ion trap mass spectrometer inline in a metalorganic vapour phase epitaxy (MOVPE) system. This setup was developed ultimately for the decomposition- and the interaction analysis of various established as well as novel metalorganic sources for MOVPE deposition of III/V semiconductors. To make in-situ gas phase and growth interaction analysis on a new level of sensitivity possible without disturbing the MOVPE growth process itself, an optimized experimental connection of the mass spectrometer to the MOVPE system is required. This work reports on the realization of such an experimental setup and provides first proof of concept for decomposition analysis. In addition, a comparison to previous studies and gas-phase analysis at MOVPE systems will be given in this work.
Highlights
The TBAs measurements and a positive comparison to literature data, which include the evidence of highly reactive species, show that this setup is suitable to detect and analyze decomposition products, and can enable deeper insights into the behavior of metal organic precursors during MOCVD
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Summary
The main challenge of gas-phase investigations of MOVPE growth processes in general is to maintain the balance between transferring the analyte as unmodified as possible into the mass spectrometer and simultaneously not influencing the MOVPE process itself This balance has been realized in this work by operating the bypass under stable conditions, similar to the reactor pressure in the growth chamber. The TBAs measurements and a positive comparison to literature data, which include the evidence of highly reactive species, show that this setup is suitable to detect and analyze decomposition products, and can enable deeper insights into the behavior of metal organic precursors during MOCVD
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