An exact algorithm for self-calibration of two-dimensional precision metrology stages

Abstract

We describe an algorithm that can achieve exact self-calibration for high-precision two-dimensional (2-D) metrology stages. Previous attempts to solve this problem have often given nonexact or impractical solutions. Self-calibration is the procedure of calibrating a metrology stage by an artifact plate whose mark positions are not precisely known. By assuming rigidness of the artifact plate, this algorithm extracts the stage error map from comparison of three different measurement views of the plate. The algorithm employs the orthogonal Fourier series to expand the stage error map, which allows fast numerical computation. When there is no random measurement noise, this algorithm exactly calibrates the stage error at those sites sampled by the mark array. In the presence of random measurement noise, the algorithm introduces a calibration error of about the same size as the random measurement noise itself, which is the limit to be achieved by any self-calibration algorithm. The algorithm has been verified by computer simulation with and without random measurement noise. Other possible applications of this algorithm are also discussed.