Abstract
A self-calibration algorithm is described that allows the separation of the flatness error of two-dimensional profiling stages through the combination with a flat artifact whose accuracy is unknown. The calibration requires performing three independent measurements with different orientations of the same artifact to make mathematical models. Then the self-calibration algorithm was simulated using Matlab. The simulation results show that when there is no random measurement noise, this algorithm can realize exact calibration of the flatness error of the stage, while in the presence of random measurement noise, the algorithm introduces a calibration error of about the same size as the random measurement noise itself.
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