An Electron Cyclotron Resonance Ion Source with Cylindrically Comb-Shaped Magnetic Field Configuration

Abstract

A new concept on magnetic field of plasma production and confinement has been proposed to enhance efficiency of an electron cyclotron resonance (ECR) plasma for broad and dense ion beam source under the low pressure. The magnetic field configuration is constructed by a pair of comb‐shaped magnet which has opposite polarity each other, and which cylindrically surrounds the plasma chamber. This magnetic configuration suppresses the loss due to ExB drift, and then plasma confinement is enhanced. The resonance zones of the fundamental and the second harmonics for 2.45GHz microwaves detach from the wall of the chamber. The connection length of the magnetic field lines through the resonance zone is elongated, and the confinement is better than that of the simple multipole magnetic field. The 2.45 GHz microwaves are fed from the side wall by the rod antenna. The electron density attained to about four times cutoff density for the 2.45GHz microwave at the low Ar pressure below 0.08Pa and also the low microwave power below 300W. We compare profiles of the electron density and temperature in the comb‐shaped magnetic field configuration with those in the simple multipole magnetic field.