Abstract
A new concept on magnetic field of plasma production and confinement has been proposed to enhance efficiency of an electron cyclotron resonance (ECR) plasma for broad and dense ion beam source under the low pressure. The magnetic field configuration is constructed by a pair of comb-shaped magnet which has opposite polarity to each other, and which cylindrically surrounds the plasma chamber. This magnetic configuration suppresses the loss due to E x B drift, and then plasma confinement is enhanced. The profiles of the electron temperature and density are measured around the ECR zones of the fundamentals and the second harmonics for 2.45 GHz and 11-13 GHz microwaves by using Langmuir probe. Their characteristics and effects are clarified under various operating conditions in both of simple multipole and comb-shaped magnetic configurations.
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