Abstract
We tried to enlarge the operation window of an electron cyclotron resonance (ECR) ion source for producing the ECR plasma confined by cylindrically comb‐shaped magnetic field, and for extracting the broad ion beam under the low pressures and low microwave powers. The magnetic field by permanent magnets constructs ECR zones at different positions for 2.45 GHz and 11 to 13 GHz microwaves, respectively. According to probe measurements, profiles of plasma density and temperature are different for using each single microwave. We conduct production of ECR plasma by launching simultaneously these two frequency microwaves, and obtain flat profiles of the electron density and the electron temperature. These profiles are not achieved by feeding single frequency microwave. It is found that plasma can be controllable on spatial profiles beyond wide operation window of plasma parameters. We conducted preliminary extracting and forming large bore ion beam from this source. We will make this source a part of tandem type ion source for the first stage. We investigated feasibility and hope to realize the device which has wide range operation window in a single device to produce many kinds of ion beams as like to universal source based on ECR ion source.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.