Abstract
Lead-zirconate-titanate (PZT) thick films on pre-fired low-temperature co-fired ceramic (LTCC) substrates were characterised and tested for the application of a piezoelectric resonant pressure sensor. The experimentally obtained material parameters for the thick-film (TF) PZT were used in a finite-element (FE) model of the sensor, which was realised in a 3D LTCC structure with a flexible diaphragm. The simulations revealed the trends and helped to optimise the design.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have