Abstract
Noncontact photothermal deflection (PTD) techniques are applied to the nondestructive photothermal detection of buried structures. The data are analyzed to take account of the finite radius of the excitation laser. The calculated PTD signals and the experimental data are compared. The modulation frequency dependence of both the PTD amplitude and phase signals has been used to estimate the thermal diffusivity. The phase spectra are more sensitive to the buried structure in the deep interior than the amplitude signals and are able to show the sharp edge at the corner of a buried structure. The case where the laser radius is larger than the buried structure is also investigated using fine cross pattern samples.
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