Abstract

The noncontact imaging of the buried structures is carried out in the open-air atmosphere by using the photothermal deflection (PTD) method. We applied these techniques to the layered samples. Besides the PTD images for the optically opaque buried structures, the parameters of the materials such as thermal diffusivity can also be calculated from the PTD amplitude and phase signal in the PTD scanning images. When the PTD signals at two different modulation frequencies are used, the thermal diffusivity of the buried structure can be obtained from the PTD signal outside of the sample nondestructively.

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