Abstract
Pd–Ti alloy surface layers in Ti formed by N- and Ar-pulse plasma alloying of Pd films deposited by pulse erosion of Pd electrode tips were studied by RBS, XRD, SIMS, and gravimetric analysis. Layers of a thickness up to 2 μm and concentration up to 40% Pd at the surface were obtained. Pd is present as a solute in hcp αTi and as TiPd and TiPd 3 phases. The Pd profiles follow Gaussian distribution although no simple theoretical model can account for this behavior.
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