Abstract
The primary focus of this work is to fabricate and evaluate electroceramic based LC resonators for wireless sensing at high temperatures. An all-ceramic planar LC resonator was fabricated on a polycrystalline Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> substrate by using tin-doped indium oxide (ITO) as the electrode material. The LC resonators were deposited on the substrate by a novel two-step micro-casting technique. The resonator was designed using the ANSYS Maxwell package to operate within a wide frequency bandwidth from 10 to 80 MHz. A similar all-ceramic inductor was fabricated and used as the interrogator antenna to collect the wireless response at high operating temperature. The wireless characterization was performed by a radio frequency (RF) signal generator and an in-situ spectrum analyzer from 500 - 1200°C. The microstructural, chemical, and electrical stability of the LC resonator was investigated by SEM, 4-point conductivity, and XRD. Additionally, a robust adaptive signal processing algorithm was developed to analyze the wireless response of multiple LC resonator. The adaptive algorithm developed in this work is data driven and does not require a predefined model to analyze the wireless response from the LC resonator.
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