Abstract

In this paper MISHEMTs with two different gate dielectrics (Al 2 O 3 and SiNx) are analyzed focusing on some analog figures of merit like transconductance, output conductance, transistor efficiency, Early voltage and intrinsic voltage gain. The Al 2 O 3 dielectric MISHEMT presented a degraded output characteristic in the bias range studied with a large self-heating turning the analog parameters impossible to be determined. The gate leakage of the SiNx MISHEMT is very high which degrades the subthreshold regime, decreasing the transistor efficiency at weak inversion, but the DIBL is much better than for the Al 2 O 3 devices. The SiNx devices present much better output characteristics resulting in a relatively large Early voltage and intrinsic voltage gain in strong inversion for this kind of devices up to 84 V/V (38.5 dB). The degradation with the temperature is small (around 1.5 dB from 25 °C to 150 °C) at strong inversion operation regime.

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