Abstract
The properties of 298nm AlGaN based deep ultraviolet light-emitting diodes (UV LEDs) with different Al mole compositions in the conventional electron blocking layer (EBL) are discussed in this paper, the optimal Al mole composition of the conventional EBL is identified at 0.8. The improved structure with an AlGaN/AlGaN superlattice (SL) electron blocking layer (EBL) was then investigated numerically. The electrical and optical properties, band diagrams, carrier concentrations, radiative recombination rates and internal quantum efficiency (IQE) were investigated by APSYS software, and results show that the deep UV LED with superlattice EBL performed much better than the conventional EBL deep UV LED, attributed to reduced electrons leakage and increased holes injection.
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