Advanced qualification method for patterns with irregular edges in printed electronics

Abstract

To evaluate the pattern transfer completeness (PTC) with respect to the line edge roughness (LER), this paper proposes an advanced method which statistically quantifies the deviations of printed patterns from their corresponding designed patterns. Complex patterns of Archimedean, logarithmic, and hyperbolic spirals are demonstrated using inkjet printing under various conditions to show different LERs and the effectiveness of the advanced method. The advanced method analyzes patterns using parametric forms in Cartesian coordinates instead of standard forms in polar coordinates, thus enabling evaluations with negligible errors which outperform existing methods. This study involved comprehensive analyses of the impacts of digitized patterns with serrated curves, different orientations of the asymmetric pattern, curvatures of the pattern, and the detection range and its movement. The results show that the advanced method not only correctly reflected the PTC, but also exhibited operational flexibilities, e.g. the evaluation efficiency may be enhanced by introducing an enlarged detection range or an increased movement of the detection range.