Abstract

We have investigated atomic hydrogen (H) adsorption on an Ag-covered 6H-SiC(0001) surface, using coaxial impact-collision ion-scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA). It has been revealed that the two-dimensional (2D) layer of Ag on the 6H-SiC(0001) surface is changed to three-dimensional (3D) islands by the adsorption of H on the surface. The 3D Ag islands have an Ag(111) crystalline structure. When this surface is annealed at 550°C, the 3D Ag islands do not revert to a 2D layer but desorb from the surface together with H.

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