Abstract
The adhesive strength of polytetrafluoroethylene (PTFE) film increased drastically by heat-assisted plasma treatment and PTFE indicated cohesive failure inside the PTFE. By increasing the temperature, defluorination progressed. The PTFE treated with H2/He had significantly lower adhesive strength than the PTFE treated with only He. The peak assigned to stretching vibration of -CH2- could be observed only in the film treated with H2/He plasma. From above, we concluded the improvement of the adhesive strength requires the formation of dangling bonds and a crosslinked structure on the PTFE surface.
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