Abstract
Polytetrafluoroethylene (PTFE) sheet surface was treated by the diborane/H2/He plasma for the deflurination to improve the adhesive strength. Diborane was generated by the H2/He plasma treatment of a boron plate and was transported to the plasma zone for PTFE sheet treatment. And then, the defluorination plasma treatment with this diborane/H2/He mixture gas performed PTFE sheet. Fluorine atom content of treated PTFE surface was decreased to about twentieth of that of untreated PTFE. The adhesive strength between treated PTFE and epoxy glue became stronger enough for practical use
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