Additive manufacturing of low-temperature co-fired ceramic substrates and surface conductors based on material jetting

Abstract

Integrated manufacturing of ceramic substrates and surface conductors using 3D material jetting (MJ) technology is a novel additive manufacturing route for low-temperature co-fired ceramics (LTCC). This study evaluates the rheological and jetting properties of LTCC nanoceramic inks with varying solids contents. Ceramic inks with 35 % solid content were found to be the optimal choice with high particle concentration and Ohnesorge numbers (Oh) below 1. The fabrication process used two piezoelectric printheads to inject nanoceramic ink and nanosilver ink to create a ceramic substrate and a surface interdigital electrode (IDE). The substrate sintering shrinkage was 21.5 % and the surface IDE co-fired at the same shrinkage rate as the substrate thus ensuring all electrode pattern details. The electrode conductors demonstrated effective line widths of up to 0.21 mm. Microscopic characterisation of the interface between silver and substrate using scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) confirmed the absence of significant elemental diffusion, and X-ray diffraction spectroscopy (XRD) results demonstrate that there is no second-phase generation, thus ensuring the effectiveness of the silver electrode. The ceramic substrates exhibit good thermal stability below 400 ℃ and have a coefficient of thermal expansion (∼ 4.1 ppm/℃) similar to that of silicon, indicating reliability in packaging. A microstrip patch antenna with the design frequency at 9–11 GHz was made through the same MJ procedure, which was experimentally measured to have a resonant frequency of 10.1 GHz, an S11 measurement of −24.6 dB, a simulated radiation efficiency of 88.01 %, and a high gain of up to 7.52 dB. Finally, a curved LTCC substrate with a radius of curvature of 50 mm and curved circuits was successfully fabricated using MJ technology. Interestingly, the curvature of the substrate maintained its original shape both before and after the sintering process, and the serpentine conductor pattern exhibited synchronous contraction, which implies the potential for developing a conformal LTCC utilizing MJ technology.