A versatile target manipulator for use in ultra-high vacuum

Abstract

A target manipulator for use in ultra-high vacuum is described. With this manipulator a target can be translated 20 mm in three mutually perpendicular directions and rotated around three mutually perpendicular rotation axes. The directions of the rotation axes are independent of each other. A special feature of this design is that the third rotation (the tilt) does not change the direction of the azimuthal rotation axis. The azimuthal and polar rotation have a range of 360°. The target temperature and beam currents can be measured at the back of the target. The target can be heated by electron bombardment on the front or by an electrical heater at the back. The whole manipulator can be mounted on a 4″ flange of the target chamber. To perform the rotation the manipulator head requires a volume with diameter of 50 mm at the centre of the target chamber. Targets with a maximum diameter of 13 cm can be inserted. Only materials suited for ultra-high vacuum are used in the construction.