Abstract
AbstractDifferential capacitive accelerometers have been fabricated using silicon micromachining, and a capacitance‐detection circuit and hybrid two‐wire sensing system have been realized.The features of the differential capacitive accelerometer are the small influence of both acceleration at other axes and temperature and in restrained parasitic capacitance due to the concentration of efforts on the structural design of the sensor. The sensitivity of the sensor depends on the residual stress in beams supporting the weight.By careful design of the capacitance‐detection circuit, the effect of both power supply voltage and temperature is small while the output signal of the sensor can be obtained from the current flowing in the two wires for power supply.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Electronics and Communications in Japan (Part II: Electronics)
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.