One platform for all researcher needs
AI-powered academic writing assistant
Your #1 AI companion for literature search
AI tool for graphics, illustrations, and artwork
Unlock unlimited use of all AI tools with the Editage Plus membership.
Explore Editage Plus
Audio Papers
Ask R Discovery
Translation
Auto-sync
Collaboration
https://doi.org/10.1016/0167-9317(87)90052-9
Copy DOI
Export
Save
Share
Cite Journal: Microelectronic Engineering |  Publication Date: Dec 1, 1987 |
 Citations: 2 |
A second generation X-ray stepper is described, based on work performed at the Institute for Microstructure Technology in Berlin. The equipment presents specifications suitable for the production of sub-half micron design rule ULSI circuits with high throughput.
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
