Abstract
This paper presents the analysis, design, and characterization of a superelastic alloy (NiTi)microgripper with integrated electromagnetic actuators and piezoelectric force sensors. Themicrogripper, fabricated by electro-discharge machining, features force sensing capability,large force output, and large displacements to accommodate objects of various sizes. Thedesign parameters for the embedded electromagnetic actuators were selected on the basis offinite element sensitivity analysis. In order to make the microgripper capable of resolvinggripping forces, piezoelectric force sensors were fabricated and integrated into themicrogripper. The performance of the microgripper, the integrated force sensors,and the electromagnetic actuators was experimentally evaluated. A satisfactorymatch between experimental results and finite element simulations was obtained.Furthermore, comparison studies demonstrated that the superelastic alloy (NiTi)microgripper was capable of producing larger displacement than a stainless steelmicrogripper. Finally, experimental results of optical fiber alignment and themanipulation of tiny biological tissues with the superelastic microgripper were presented.
Published Version
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