Abstract
This paper presents a superelastic alloy microgripper with integrated electromagnetic actuators and piezoelectric sensors. The design parameters for electromagnetic actuators in the microgripper are selected based on the sensitivity analysis using FEM analysis. For integration of miniature force sensors in the microgripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are also presented. Electro discharge machining technology is employed to fabricate the microgripper structure made of superelastic NiTi alloy. The experimental setup is implemented to evaluate the performance of the fabricated force sensors and electromagnetic actuators integrated into the microgripper. Finally, results of finite element computer simulations for electromagnetic actuators and piezoelectric polymer sensors are compared with experimental results.
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