A source of broad homogeneous beams of low-energy (∼0.5 keV) gas ions

Abstract

A source of gas ions (argon, oxygen, nitrogen, etc.), the operating principle of which is based on the use of a glow discharge in an electrode system of a wide-aperture hollow cathode and anode in a magnetic field, is described. The exit aperture diameter of the hollow cathode, increased up to a size close to the ion beam diameter (10 cm), ensures the uniform ion emission of the plasma generated in the discharge region near the anode. A decreased angular divergence or increased ultimate ion-beam current density is achieved by a change in the potential drop in the space charge sheath between the plasma and the ion optics. The source generates broad (50 cm2) slightly diverging (ω/2∼3°–5°) ion beams with energies of 300–1000 eV at a beam current density of ∼0.5 mA/cm2.